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・Compact manifold with two 3-port valves on 1 station
・Connector (For plug-in connection)
・Individually wired valves can be added.
| Series | Flow rate characteristics 2a/2b→3（E） C［dm3/（s・bar）］ |
Flow rate characteristics 2a/2b→3（E） b |
Power consumption (W) |
For use in vacuum applications |
|---|---|---|---|---|
| VV100 | 0.05 | 0.29 | 0.4(Standard) 0.15(With power saving circuit) |
－100 kPa |
