・Applicable to 0603 chips
・Response speed: 13 msec (at the time of 500 mm*) /18.5 msec (at the time of
1000 mm*)
・Smooth workpiece removal with no overshoot
・There is no need for timing adjustment of switchback between vacuum and positive pressure.
・A throttle circuit is not required for release air.
・Suction filter: ZFC050 (Made to order)