・This filter enables the direct exhaust of air in a clean room.
(Cleanliness class 4: ISO14644-1)
Air can be directly exhausted in a clean room by simply mounting this
product to the pneumatic equipment in the clean room.
・Piping for exhaust air and relief air is not required.
Reduces piping installation work and space
・Noise reduction: 30 dB (A) or more
・One-touch fitting type is available.
Series | Filtration (μm) | Maximum flow capacity L/min (ANR) | Port size |
---|---|---|---|
SFE | 0.01 (Filtration efficiency: 99.99%) | 3,30,65,130,200 | M5 x 0.8,R1/8,R1/4 φ4,φ6,φ8,φ10 |