HRW

・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not
required.
・Suitable for semiconductor processing equipment with a wide variety of features,
such as high-temperature stability, a wide temperature range, failure diagnosis,
external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.