English
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・Temperatures for 2 systems can be controlled separately by one chiller.
・Double inverter type: Substantially more energy is saved by using a DC inverter refrigerator and inverter pump. ・Space saving: Footprint reduced by 23% ・Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system ・Compliant with SEMI Standards, CE-marking |
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRZD | −30 to 90℃ | 9.5 kW x 2 | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Ethylene glycol aqueous solution (60%) |
