English
・Modularized clean equipment (Reduced piping labor/Space saving)
Makes clean air easily available
・Nominal filtration rating: 0.01 μm (Filtration efficiency: 99.99%)
・Wetted parts: Grease-free, Silicone-free
・Assembled in a clean room, Shipped and packed in double packaging
・24 combinations are available.
Makes clean air easily available
・Nominal filtration rating: 0.01 μm (Filtration efficiency: 99.99%)
・Wetted parts: Grease-free, Silicone-free
・Assembled in a clean room, Shipped and packed in double packaging
・24 combinations are available.
| Series | Fluid | Set pressure | Flow range L/min (ANR) |
|---|---|---|---|
| LLB3 | Clean air N2 gas Note) |
0.05 to 0.4 MPa | 5 to 100 |
| LLB4 | Clean air N2 gas Note) |
0.05 to 0.4 MPa | 50 to 500 |
