・A vertically compact configuration has been achieved through the use of
a rotary actuator as the drive force source.
・Repeatability: ±0.01 mm
・Supports class 10 clean rooms
・With auto switch (MDHR2 series: MDHR2)
Series | Cylinder bore size (mm) |
---|---|
MHR2 | Nominal size 10,15,20,30 |
MDHR2 | Nominal size 10,15,20,30 |