English
・Body sensor: New PFA, Tube: Super PFA
・Low particle generation, Excellent flow-through characteristics
・4-channel flow monitor
4 different flow ranges can be connected to 1 controller.
| Series | Rated flow range (L/min) |
|---|---|
| PF2D | 0.4 to 4 1.8 to 20 4.0 to 40 |
