English
・Cartridge type allows for element replacement
(SFA100/200/300, SFB100)
・Compact, disposable type for the semiconductor industry
(SFB300, SFC100)
| Type | Series | Operating pressure | Filtration (μm) |
|---|---|---|---|
| Cartridge type disc | SFA100/200/300 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） |
0.01 (Filtration efficiency: 99.99%) |
| Cartridge type straight | SFB100 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） |
0.01 (Filtration efficiency: 99.99%) |
| Cartridge type straight | SFB200 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） |
120 |
| Disposable type straight | SFB300 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） |
0.01 (Filtration efficiency: 99.99%) |
| Disposable type multiple disc | SFC100 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） |
0.01 (Filtration efficiency: 99.99%) |
