English
・Suitable for semiconductor processing equipment with a wide variety of features,
such as high-temperature stability, a wide temperature range, failure diagnosis,
external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ |
1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
