・The external pilot specification can be used for vacuum applications.
・Can be mounted on an aluminum body manifold or a DIN rail
・Manifold type no.: VV3QZ12, VV3QZ15, VV3QZ22, VV3QZ25,
VV3QZ32, VV3QZ35
Series | Flow rate characteristics 2→3(A→R) C[dm3/(s・bar)] |
Flow rate characteristics 2→3(A→R) b |
Flow rate characteristics 2→3(A→R) Cv |
Power consumption (W) |
For use in vacuum applications |
---|---|---|---|---|---|
VQZ100 | 0.56 | 0.30 | 0.14 | 0.35(Standard) 0.9(High pressure type, High speed response type) |
-100 kPa |
VQZ200 | 1.7 | 0.36 | 0.45 | 0.35(Standard) 0.9(High pressure type, High speed response type) |
-100 kPa |
VQZ300 | 3.0 | 0.33 | 0.72 | 0.35(Standard) 0.9(High pressure type, High speed response type) |
-100 kPa |