English
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・Minimum operating pressure: 1 × 10-6 Pa (abs)
・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s ・2 types of fittings and female threads are available. ・Power consumption: Max. 25% reduction ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg) |
| Series | Valve type | Fluid | Piping | Port size |
|---|---|---|---|---|
| XSA | Normally closed | Air Inert gas |
Face seal fitting Compression fitting |
1/4, 3/8 |
| XSA | Normally closed | Air Inert gas |
Rc, NPT female thread | 1/8, 1/4, 3/8 |
