English
・Prevents problems related to vacuum circuits or airborne contaminants
・Vacuum tubes can be connected and removed by a one-touch operation.
| Series | Applicable tubing O.D. Metric |
Applicable tubing O.D. Inch |
Flow rate L/min (ANR) |
Filtration (μm) |
|---|---|---|---|---|
| ZFB10 | φ4, φ6 | φ3/16, φ1/4 | 10 to 20 | 30 |
| ZFB20 | φ6, φ8 | φ1/4 | 30 to 50 | 30 |
| ZFB30 | φ8, φ10 | φ3/8 | 75 | 30 |
| ZFB40 | – | φ1/2 | 100 | 30 |
